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Principle of Microwave Plasma Generator

1 Microwave source 2 Circulator 3 Automatic impedance regulator 4 Waveguide 5 Plasma nozzle 6 Short-circuit piston微波等離子體炬的原理是將微波能量通過(guò)匹配調(diào)節(jié)器，聚Set at the plasma nozzle to excite and maintain the plasma The block diagram of the traditional microwave plasma generator is as above. In practical applications, the microwave plasma excitation device has the following application difficulties 1. The system is complex and the device is large 2. Microwave excited plasma discharge is difficult, and it is difficult to realize self-excited ignition 3. The maintenance of microwave plasma is extremely sensitive to impedance. During plasma processing, it is necessary to adjust the impedance in real time to maintain the plasma torch.

Reducing system complexity and improving the excitation and maintenance stability of microwave plasma are the key to microwave plasma applications Application, performance and index of atmospheric pressure nitrogen microwave low temperature plasma torch Main applications and advantages Main application: online plasma treatment, surface modification and activation of materials Differentiation advantages: Ultra-low temperature atmospheric pressure plasma solution The fixed-point saturation temperature measurement can reach as low as 400C (the same test method is measured by the nominal 700C-900C normal pressure intermediate frequency plasma on the market. 2500C-3000C) The plasma jet temperature is lower than most atmospheric argon plasmas on the market Superior and stable treatment effect Lowest cost of ultra-low temperature atmospheric pressure plasma solution Long jet, high passability Really neutral, non-electrically damaged plasma solution Wide range of materials, suitable for atmospheric pressure plasma surface treatment of a variety of materials The treatment effect is maintained for a long time, which is close to the RF vacuum solution

Performance and index-200W, nitrogen microwave plasma torch Minimum plasma temperature: 40 Deg.C Plasma jet length: 25~35mm Plasma treatment range: diameter 10~25mm Working power range: 10~180W (40~120W recommended) Gas flow: 10~35 slm (20~30slm recommended)

Microwave torch and jet form

Microwave source chassis appearance